Title:
MEASURING METHOD OF GAS PRESSURE AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3664002
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To precisely measure the sealed gas pressure of a gas-sealed apparatus having a dispersion of electrode interval or a gas-sealed apparatus having a fluctuating electrode interval.
SOLUTION: This measuring method of gas pressure comprises applying a high voltage between a pair of electrodes, generating a discharge to gain a discharge voltage, and calculating the gas pressure on the basis of this discharge voltage. In this method, the capacitance between the electrodes is gained, the electrode interval is calculated from the capacitance, and the gas pressure is calculated from the discharge voltage and the electrode interval.
Inventors:
Yasuhiro Miura
Fumitaka Ohta
Fumitaka Ohta
Application Number:
JP31319799A
Publication Date:
June 22, 2005
Filing Date:
November 04, 1999
Export Citation:
Assignee:
OMRON Corporation
International Classes:
G01L9/00; G01B7/14; G01L21/30; G01L21/34; (IPC1-7): G01L21/30
Domestic Patent References:
| JP3037538A | ||||
| JP11195382A | ||||
| JP59046726A |
Attorney, Agent or Firm:
Yoshiaki Nagata
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