Title:
被検面の形状を計測する計測方法、計測装置及び光学素子の製造方法
Document Type and Number:
Japanese Patent JP5442122
Kind Code:
B2
Abstract:
Provided is a measurement method or apparatus that can reduce the time for measuring the shape of an entire test surface. Each of a plurality of measurement ranges is set so that one measurement range overlaps a portion of at least another measurement range to form an overlap region, each measurement range being a portion of the test surface. Then, the shape of the test surface is measured at a first resolution in a first measurement range among the plurality of measurement ranges, and is measured at a second resolution in a second measurement range. Pieces of data of the shapes of the test surface in the plurality of measurement ranges are stitched using the resulting measurement data to calculate the shape of the test surface,
Inventors:
Yumiko Osaki
Application Number:
JP2012524373A
Publication Date:
March 12, 2014
Filing Date:
July 15, 2010
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/24; G01J9/02; G01M11/00
Domestic Patent References:
| JPH02259509A | 1990-10-22 | |||
| JPH08240417A | 1996-09-17 | |||
| JP2000287223A | 2000-10-13 | |||
| JP2008224552A | 2008-09-25 | |||
| JP2006250859A | 2006-09-21 | |||
| JP2004286561A | 2004-10-14 | |||
| JP2009244228A | 2009-10-22 | |||
| JP2008510146A | 2008-04-03 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa