PURPOSE: To measure thickness in groove bottoms accurately by measuring the positions of the bottom surfaces in narrow grooves optically and the positions of end bottom surfaces with an electric micrometer.
CONSTITUTION: A sample (easy to open end) 1 is placed on a jig table 14 and is fixed by means of jigs 17. The light from the light source part 21 of an optical measuring device 20 is projected as spot light to the bottom surface of a score and the light reflected therefrom is received in an optical system 23 on a photodetecting side. After the light is adjusted with an eyepiece part 25, the reflected light is detected with a photodetecting part 24, and the distance between the bottom surface of the score and a reference place is measured. On the other hand, the distance between the bottom surface of the end and the reference plane is measured with an electric micrometer 15, and data is fed to a computer, by which score residual is determined. On the other hand, a stage 12 is moved by a specified pitch with a pulse motor 13, and if the similar measurement is carried out at every pitch, the sectional contour of the score is determined. Thus the thickness in the groove bottom is measured accurately.
SUGIYAMA MIKIO
SERIZAWA KATSUTOSHI
KAWAI TOMOHIKO
TOKYO KOUON DENPA KK