Title:
MEASURING SYSTEM, MEASUREMENT METHOD, OPERATION METHOD, AND OPERATION PROGRAM
Document Type and Number:
Japanese Patent JP2017181262
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a measuring system which can extract particles from an electron microscope image of the particles in a liquid.SOLUTION: The method includes: sampling means for dropping a liquid containing specific particles to a film-like filter with plural holes and then conducting specific processing on the filter; measuring means for imaging the filter subjected to the specific processing in the sampling means, by an electron microscope; and operation means for removing the part for the holes from the image of the filter based on information on the holes of the filter, extracting a region with a specific size in the image as the particles, and calculating the particle size of the particles and the number of particles for each size.SELECTED DRAWING: Figure 3
Inventors:
KURATA AKIYOSHI
NOGUCHI MINORU
SATO KENICHI
NOGUCHI MINORU
SATO KENICHI
Application Number:
JP2016067889A
Publication Date:
October 05, 2017
Filing Date:
March 30, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
G01N15/02; G01B11/02; G01B15/00; G01N23/04; G01N23/225; H01J37/20; H01J37/22
Attorney, Agent or Firm:
Yoshiyuki Kawaguchi
Akira Hirakawa
Takehiko Sekine
Katsuhiko Imahori
Hiroaki Otake
Akira Hirakawa
Takehiko Sekine
Katsuhiko Imahori
Hiroaki Otake