Title:
力学量センサ素子
Document Type and Number:
Japanese Patent JP4776902
Kind Code:
B2
Abstract:
A physical sensor having a pressure sensing layer having such property that electrical resistance is changed by application of a stress, and electrical insulating layers which are integrally formed on opposite two surfaces of the pressure sensing layer, respectively, wherein the pressure sensing layer has a matrix comprising glass, and an electrically conductive particle having electrical conductivity and dispersed in the matrix and preferably, the electrically conductive particle includes RuO2, and a thickness of the pressure sensing layer is 1 mum to 200 mum, and it is preferable that one pair of electrodes are disposed on the pressure sensing layer.
Inventors:
Mitsuru Asai
Hiroaki Makino
Takahiko Homma
Kazumasa Takatori
Jun Sugiyama
Hiroaki Makino
Takahiko Homma
Kazumasa Takatori
Jun Sugiyama
Application Number:
JP2004243860A
Publication Date:
September 21, 2011
Filing Date:
August 24, 2004
Export Citation:
Assignee:
Toyota Central R & D Labs.
International Classes:
G01L1/18; G01L1/20; G01L3/00
Domestic Patent References:
| JP2002202209A | ||||
| JP2003247898A | ||||
| JP8304200A | ||||
| JP2007107963A |
Other References:
Hrovat, M.; Belavic, D.; Samardzija, Z.; Holc, J. An investigation of thick-film resistor, fired at different temperatures, for strain sensors. International Spring Seminar on Electronics Technology 2001, 32-36.
松下,徹;PbO-SiO2-B2O3系ガラスにおける軟化および流動性,北海道大學工學部研究報告 = Bulletin of the Faculty ofEngineering, Hokkaido University, 75: 137-144
松下,徹;PbO-SiO2-B2O3系ガラスにおける軟化および流動性,北海道大學工學部研究報告 = Bulletin of the Faculty ofEngineering, Hokkaido University, 75: 137-144
Attorney, Agent or Firm:
Yoshiyasu Takahashi