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Patent Searching and Data


Title:
薬液移送装置
Document Type and Number:
Japanese Patent JP2012501399
Kind Code:
A
Abstract:
A chemical liquid feeding device for feeding chemical liquid used in a semiconductor fabrication process. The device includes three or more pumps arranged in a line. Each pump has different time points of suction stroke and discharge stroke so that the chemical liquid can be fed uniformly without pulsation.

Inventors:
Hong Samsung
Kim Hyung Il
Application Number:
JP2011524877A
Publication Date:
January 19, 2012
Filing Date:
September 10, 2008
Export Citation:
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Assignee:
C & G HI TECH CO., LTD.
International Classes:
F04B11/00; F04B43/10
Domestic Patent References:
JP2001107872A2001-04-17
JPH0457324U1992-05-18
JPS59105977A1984-06-19
Attorney, Agent or Firm:
Sakuo Yamaguchi