Title:
薬液移送装置
Document Type and Number:
Japanese Patent JP5422653
Kind Code:
B2
Abstract:
A chemical liquid feeding device for feeding chemical liquid used in a semiconductor fabrication process. The device includes three or more pumps arranged in a line. Each pump has different time points of suction stroke and discharge stroke so that the chemical liquid can be fed uniformly without pulsation.
Inventors:
Hong Samsung
Kim Hyung Il
Kim Hyung Il
Application Number:
JP2011524877A
Publication Date:
February 19, 2014
Filing Date:
September 10, 2008
Export Citation:
Assignee:
C & G HI TECH CO., LTD.
International Classes:
F04B23/06; F04B11/00; F04B43/10
Domestic Patent References:
| JP2001107872A | ||||
| JP4057324U | ||||
| JP59105977A |
Attorney, Agent or Firm:
Sakuo Yamaguchi