To provide superior static attracting force and the withstand voltage by forming an electrode protecting film by wrapping several times a resin film having volume specific resistance and dielectric constant in specific ranges.

An electrode protecting layer 16 is formed on an outer peripheral surface of a tubular body 12, having an electrode pattern 14 for protecting the electrode pattern 14 from the external force. The electrode protecting layer 16 is formed by wrapping a film several times composed of a resin single body or a composite resin having 109 through 1015 Ω.cm for volume specific resistance and above 3.0 and below 30.0 of dielectric constant, on the electrode pattern 14. The electrode protecting layer 16 has characteristics that the volume specific resistance is also 109-1015 Ω.cm and the dielectric constant is above 3.0 and below 30.0. By the composite resin here is meant a resin prepared by mixing a dielectric additive and/or an additive of high dielectric constant to the resin single body. As the resin used in the resin film for forming the electrode protecting layer 16, a thermoplastic resin, a non-thermoplastic resin, rubber and thermoplastic elastomer can be used.