Title:
MELT INTRODUCING TUBE, AND PRODUCTION APPARATUS OF SILICON SINGLE CRYSTAL USING THE SAME
Document Type and Number:
Japanese Patent JP2018039690
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a melt introducing tube capable of suppressing clogging and splashing of a raw material melt, and a production apparatus of a silicon single crystal using the same.SOLUTION: A production apparatus includes a chamber 11, a crucible 21 to contain a silicon melt M, a first heater 25 to melt a silicon raw material, a draw-up mechanism 32 of which the tip holds a seed crystal S that is immersed in the silicon melt M and drawn up, and a melt supplying mechanism 50 to supply the silicon melt M from outside of the chamber 11. The melt supplying mechanism 50 includes a melt introducing tube 51 arranged at a tilt angle θ1 of 50°-80° to the surface of the silicon melt M and a melt producing mechanism 54 to supply the silicon melt M to an opening 512 at an end of the melt introducing tube 51. The tip of the melt introducing tube 51 is a circular plane with an angle θ2 to the direction vertical to the axis of the melt introducing tube 51. At the opening 511 of the melt introducing tube 51, the vertically lower side of the circular plane is located more ahead than the vertically upper side in the axial direction.SELECTED DRAWING: Figure 1
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Inventors:
HAYASHI MITSUAKI
SUGIMURA WATARU
SHIMOZAKI IPPEI
SUGIMURA WATARU
SHIMOZAKI IPPEI
Application Number:
JP2016173700A
Publication Date:
March 15, 2018
Filing Date:
September 06, 2016
Export Citation:
Assignee:
SUMCO CORP
International Classes:
C30B29/06; C30B15/00; F27B14/16; F27D3/14
Attorney, Agent or Firm:
Eternal patent business corporation