MEMBER FOR TREATMENT CHAMBER

Japanese Patent JP3164559

B2

PROBLEM TO BE SOLVED: To produce a member for a treatment chamber having sufficient corrosion resistance against a corrosive gas atmosphere, especially a fluoride gas and its plasma, and hardly causing peeling of deposits, and to produce a member for a treatment chamber having strong resistance against thermal shock.
SOLUTION: This member is to be used for a treatment chamber in which treatment with a corrosive gas is carried out. The member consists of a polycrystalline ceramic material essentially comprising yttrium-aluminum-garnet. The surface roughness Ra of the member on the inner face of the chamber is >1 μm. Further, the member has a curved form having a first spherical part with ≥300 mm radius of curvature R1 and a second spherical part with ≥10 mm radius of curvature R2 which continues to the edge of the first spherical part. Either the first spherical part or second spherical part is internally in contact with the other, and the thickness of the curved form ranges from 5 to 15 mm.

JPH01228146	MANUFACTURE OF SEMICONDUCTOR DEVICE
JPS5441068	PRODUCTION OF SEMICONDUCTOR DEVICES

Naomi Odano
Daiki Suzuki
Eiji Fukuda
Chiharu Wada
Yukio Kishi
Hiromichi Ohtaki
Atsushi Suzuki

JP37194198A

May 08, 2001

December 28, 1998

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Taiheiyo Cement Co., Ltd.
Nippon Ceratech Co., Ltd.

H01L21/302; B01J19/00; C04B35/44; H01L21/3065; (IPC1-7): C04B35/44; B01J19/00; H01L21/3065

JP10236871A
JP1045461A

Ｒ．Ｄ．Ｓｈａｎｎｏｎ，ｅｔ ａｌ．「Ｄｉｅｌｅｃｔｒｉｃ ｃｏｎｓｔａｎｔｓ ｏｆ ｙｔｔｒｉｕｍ ａｎｄ ｒａｒｅ−ｅａｒｔｈ ｇａｒｎｅｔｓ，ｔｈｅ ｐｏｌａｒｉｚａｂｉｌｉｔｙ ｏｆ ｇａｌｌｉｕｍ ｏｘｉｄｅ，ａｎｄ ｔｈｅ ｏｘｉｄｅ ａｄｄｉｔｉｖｉｔｙ ｒｕｌｅ」，Ｊｏｕｒｎａｌ ｏｆ ＡＰＰＬＩＥＤ ＰＨＹＳＩＣＳ，（１９９０），第６７巻，第８号，第３７９８−３８０２頁

Hiroshi Takayama

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