To provide a membrane structure element which can be easily fabricated and has high heat insulation and high quality, and to provide a method of manufacturing the same.
In this manufacturing method, the membrane structural element is manufactured which includes a membrane formed of a silicon oxide film and a substrate for supporting the membrane in the air by supporting a part of the outer edge of the membrane. The method includes a film forming step of forming a heat-shrinkable silicon oxide film 13 on a surface of a silicon substrate 2 by plasma CVD, a heat treatment step of performing heat treatment for thermally shrinking the silicon oxide film 13 having been formed on the substrate 1, and a removal step of forming a concave portion 4 by removing a part of the substrate 2 such that a portion corresponding to the membrane in the silicon oxide film 13 is supported in the air relative to the substrate 2.
COPYRIGHT: (C)2008,JPO&INPIT
Nobuyuki Kawakami
Amanaka
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