Title:
メンブレン構造素子及びその製造方法
Document Type and Number:
Japanese Patent JP4888908
Kind Code:
B2
Abstract:
A membrane structure element which includes a membrane base member and a metal wiring having improved bonding to the membrane base member and in which the membrane base member has improved flatness. It can be easily produced and has excellent durability. Also provided is a process for producing the element. The membrane structure element comprises: a membrane base member (1) which consists mainly of a silicon oxide membrane which has been thermally shrunk; and a substrate (2) which supports part of the periphery of the membrane base member (1) to thereby support the membrane base member so as to leave a space between these. The membrane base member has an insulating adhesion layer (14) disposed on the front side, and a metal wiring (6) has been formed on the layer (14). The insulating adhesion layer (14) is made of one or more oxide compounds comprising aluminum oxide as a major component. A coating layer constituted of a silicon oxide film may be formed so as to coat the metal wiring (6) therewith.
Inventors:
Takayuki Hirano
Application Number:
JP2007269786A
Publication Date:
February 29, 2012
Filing Date:
October 17, 2007
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
H01L37/00; G01F1/692; G01J1/02; G01K7/18; G01N27/04; H01L21/316
Domestic Patent References:
| JP2003344155A | ||||
| JP2000298061A | ||||
| JP2000298060A | ||||
| JP2000340848A | ||||
| JP2007071737A |
Foreign References:
| WO2007114191A1 |
Attorney, Agent or Firm:
Honda Tatsuo