Title:
MEMBRANE VACUUM PUMP
Document Type and Number:
Japanese Patent JP2017078402
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To accomplish a membrane vacuum pump which has a compact and simple structure and overcomes disadvantages of a conventional art, in particular with respect to wear and dead volume.SOLUTION: A membrane vacuum pump comprises: at least one working chamber (13, 13a, 13b) which is bounded by a membrane (15) deformable for changing the size of the working chamber and by a wall part (17, 17a, 17b) in which at least one inlet (23a, 23b) and at least one outlet (25a, 25b) are formed and a medium is sucked into the expanding working chamber (13, 13a, 13b) in a suction phase via the inlet and is expelled in a compression phase via the outlet from the working chamber contracting at that time; and an actuator unit (31, 31a, 31b) drivable for deformation of the membrane by non-contact biasing on the membrane (15) by means of an electric field and/or a magnetic field.SELECTED DRAWING: Figure 1
Inventors:
CONRAD ARMIN
Application Number:
JP2016162584A
Publication Date:
April 27, 2017
Filing Date:
August 23, 2016
Export Citation:
Assignee:
PFEIFFER VACUUM GMBH
International Classes:
F04B45/047
Domestic Patent References:
| JP2014015930A | 2014-01-30 | |||
| JPH0443875A | 1992-02-13 |
Foreign References:
| US2659310A | 1953-11-17 | |||
| US4498850A | 1985-02-12 | |||
| GB700368A | 1953-12-02 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Kiyota Eisho
Blacksmith
Atsushi Shinohara
Kiyota Eisho