Title:
MEMS ACTUATOR
Document Type and Number:
Japanese Patent JP2011128173
Kind Code:
A
Abstract:
To provide an MEMS actuator which can be reduced size at least in one direction and can perform two-dimensional scanning of laser light or the like.
The size of the MEMS actuator 1 viewing from the normal line direction of the first movable part 21 can be reduced by arranging second fixed parts 32, 33 which support a second movable part 31 which rocks around a second axis line Y wherein first fixed parts 22, 23 which support a first movable part 21 which rocks around a first axis line X, are laminated, inside the second movable part 31, or in linkage with a narrowed part 312A of the second movable part 31.
Inventors:
YAMAGUCHI MASATAKA
Application Number:
JP2008105333A
Publication Date:
June 30, 2011
Filing Date:
April 15, 2008
Export Citation:
Assignee:
SUMITOMO PRECISION PROD CO
International Classes:
G02B26/10; B81B3/00; H02K33/18
Attorney, Agent or Firm:
Minoru Ohnaka
Nobuo Ouchi
Suzuki Katsuto
Nobuo Ouchi
Suzuki Katsuto