Title:
MEMS DEVICE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2018148473
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a structure of a MEMS device which prevents film breakage while improving the sensitivity of the MEMS device.SOLUTION: A movable electrode 8 has a multilayer structure composed of membrane layers 4, 7 having different thicknesses, and a slit 6 formed in the movable electrode 8 is configured with a wide slit 3 formed in a thick membrane layer and a narrow slit 6 formed in a thin membrane layer, so that it becomes possible to suppress lowering of low frequency sensitivity and maintain strength of the movable electrode 8.SELECTED DRAWING: Figure 6
Inventors:
ARAKI SHINICHI
Application Number:
JP2017043419A
Publication Date:
September 20, 2018
Filing Date:
March 08, 2017
Export Citation:
Assignee:
NEW JAPAN RADIO CO LTD
International Classes:
H04R19/04; B81B3/00; B81C1/00; H01L21/768; H01L23/532; H04R31/00
Domestic Patent References:
| JP2016066969A | 2016-04-28 | |||
| JPS55115216A | 1980-09-05 | |||
| JP2007104641A | 2007-04-19 | |||
| JP2016185574A | 2016-10-27 | |||
| JP2008028513A | 2008-02-07 |