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Patent Searching and Data


Title:
MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2017147545
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a MEMS device capable of preventing destruction of the MEMS device and suppressing decrease or fluctuation in sensitivity and a method of manufacturing the same.SOLUTION: A second spacer 12 is formed between a silicon substrate 1 and a diaphragm film 3 serving as a movable electrode. By forming a cross section of an end portion of the spacer in an inversely tapered shape, breakage of the movable electrode or deformation and displacement of the movable electrode does not occur, and reduction or fluctuation in the sensitivity of a MEMS device is prevented.SELECTED DRAWING: Figure 2

Inventors:
USUI TAKAHIDE
SUZUKI AKIRA
Application Number:
JP2016026930A
Publication Date:
August 24, 2017
Filing Date:
February 16, 2016
Export Citation:
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Assignee:
NEW JAPAN RADIO CO LTD
International Classes:
H04R19/04; B81B3/00; B81C1/00; H01L29/84; H04R31/00