Title:
MEMS DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING ELEMENT
Document Type and Number:
Japanese Patent JP2015145801
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an MEMS device, a pressure sensor, an altimeter, an electronic apparatus, and a moving element in which the possibility of a coated layer touching a sensor element can be reduced.SOLUTION: An MEMS device according to the present invention includes a circuit board 6, a sensor element 7 mounted on the circuit board 6, an enclosure wall disposed on one surface of the circuit board 6 and enclosing the sensor element 7 in a plan view, a coated layer 87 overlapping the circuit board 6 in a plan view and connected to the enclosure wall, and a reinforcement layer 821 disposed between the coated layer 87 and the sensor element 7, the enclosure wall having a circuit board-side enclosure wall 88 and a coated layer-side enclosure wall 89 located closer to the coated layer 87 side than the circuit board-side enclosure wall 88, at least part of it being disposed more inward in a plan view than the circuit board-side enclosure wall 88.
Inventors:
MATSUZAWA YUSUKE
Application Number:
JP2014018074A
Publication Date:
August 13, 2015
Filing Date:
January 31, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01L9/00; B81B3/00; B81B7/02; H01L29/84
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi