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Patent Searching and Data


Title:
MEMS DEVICE
Document Type and Number:
Japanese Patent JP2011066150
Kind Code:
A
Abstract:

To achieve a MEMS device that suppresses characteristic deterioration due to a creep phenomenon.

The MEMS device includes: electrodes 11, 12 provided on a substrate 9; a movable structure 2 which is supported in midair above the electrodes 11, 12 by first and second anchor portions provided on the substrate 9, and moves toward the electrodes 11, 12; a spring structure which connects the anchor portion to the movable structure 2 and uses a ductile material; and a spring structure 45 which connects the anchor portion 52 to the upper electrode 2 and uses a brittle material.


Inventors:
Ikehashi, Tamio
Tomizawa, Yasushi
Masunishi, Katsura
Saito, Tomohiro
Application Number:
JP2009000214807
Publication Date:
March 31, 2011
Filing Date:
September 16, 2009
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01G5/16; B81B3/00; H01H59/00
Domestic Patent References:
JP2004181552A
JP2009105031A
JP2003270555A
Foreign References:
WO2005059933A1
Attorney, Agent or Firm:
蔵田 昌俊
河野 哲
中村 誠
福原 淑弘
峰 隆司
白根 俊郎
村松 貞男
野河 信久
幸長 保次郎
河野 直樹
砂川 克
勝村 紘
河井 将次
佐藤 立志
岡田 貴志
堀内 美保子
竹内 将訓
市原 卓三
山下 元