Title:
MEMS DEVICE
Document Type and Number:
Japanese Patent JP2016170018
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a MEMS device capable of preventing thermal expansion of a connection part having a lamination structure in the MEMS device.SOLUTION: A MEMS device includes: a variable capacitor 100 having a first electrode (lower electrode) 20 which is fixed to a ground layer 10 and a second electrode (upper electrode) 40 which is formed movably above the first electrode 20; and a lamination structure 50 constituted of plural layers including a connection part (anchor part) 55 connected to the second electrode 40, which covers the variable capacitor 100 forming a cavity 60 therein. A predetermined layer (intermediate layer) 52 in the plural layers is not formed in a first area 56 which includes at least a part of the connection part 55.SELECTED DRAWING: Figure 1
Inventors:
HAYASHI HIROMI
Application Number:
JP2015049494A
Publication Date:
September 23, 2016
Filing Date:
March 12, 2015
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01L9/00; H01G5/16; H01L29/84
Attorney, Agent or Firm:
Suzue International Patent Office
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