Title:
MEMS DEVICE
Document Type and Number:
Japanese Patent JP2021154438
Kind Code:
A
Abstract:
To provide an MEMS device that can be reduced in size and can achieve reduced cost of manufacture.SOLUTION: An MEMS device has a substrate 10 composed of glass, one or more MEMS elements 11 provided on the substrate 10, and an integrated circuit 12 that is provided on the substrate 10 and controls the MEMS element 11.SELECTED DRAWING: Figure 4
Inventors:
EBISAWA ISAO
HIRUTA NAOYA
YOSHIDA YASUHIKO
TERASONO KOJI
HIRUTA NAOYA
YOSHIDA YASUHIKO
TERASONO KOJI
Application Number:
JP2020057045A
Publication Date:
October 07, 2021
Filing Date:
March 27, 2020
Export Citation:
Assignee:
TOPPAN PRINTING CO LTD
International Classes:
B81B3/00; G01J1/02; H04R1/40; H04R3/00; H04R19/04
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Tadashi Inoue
Naoki Kono
Shigeru Iino
Sanae Kaneko
Nobuhisa Nogawa
Tadashi Inoue
Naoki Kono
Shigeru Iino
Sanae Kaneko