Title:
MEMS ELEMENT AND OSCILLATOR
Document Type and Number:
Japanese Patent JP2011189423
Kind Code:
A
Abstract:
To provide a miniaturizable MEMS element by storing a first vibrator and a second vibrator in one cavity part.
This MEMS element 100 includes a substrate 10, the cavity part 32 formed above the substrate 10, the first vibrator 20a stored in the cavity part 32 and the second vibrator 20b stored in the cavity part 32.
Inventors:
INABA SHOGO
Application Number:
JP2010055489A
Publication Date:
September 29, 2011
Filing Date:
March 12, 2010
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B81B3/00; H01L23/02; H03B5/30; H03H9/24
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Misa Nagata
Mitsue Obuchi
Misa Nagata