To provide a variable capacitance element suppressing warping of movable part.

Second movable parts 10 are provided on both sides in the X-axis direction of a first movable part 7, and the first movable part 7 and the second movable parts 10 are connected by insulated connecting beams 9. The second movable parts 10 are connected to supporting parts 5 by supporting beams 12. The second parts 10, the connecting beams 9 and the supporting beams 12 are shaped symmetric in the X-axis direction with respect to the first movable part 7 existing therebetween. This prevents the warping of the first movable part 7 and the second movable parts 10 from accumulating and reduces the total warping of the first movable part 7 and the second movable parts 10.