Title:
MEMS SENSOR
Document Type and Number:
Japanese Patent JP2023132229
Kind Code:
A
Abstract:
To provide an MEMS sensor with which membrane destruction is prevented while suppressing effects on characteristics.SOLUTION: An MEMS sensor, which detects a membrane curvature in a prescribed range with a strain gauge, includes a cavity which is provided to a substrate, a membrane that covers the substrate to seal the cavity, and a strain gauge which is provided to the membrane, the cavity having an island part that projects from the bottom surface, the membrane contacting the island part when the membrane is bent exceeding a prescribed range within the range in which it is reversibly bent. The distance between the membrane and the bottom surface of the cavity while the membrane is in an unbent standard state, can be at least five times the distance between the membrane and the island part.SELECTED DRAWING: Figure 1
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Inventors:
SAKURAGI MASAHIRO
Application Number:
JP2022037426A
Publication Date:
September 22, 2023
Filing Date:
March 10, 2022
Export Citation:
Assignee:
ROHM CO LTD
International Classes:
G01L19/06; G01L7/08; G01L9/00; H10N30/30; H10N30/88
Attorney, Agent or Firm:
Norito Yamao
Shigeo Kawasaki
Haruo Nakano
Shigeo Kawasaki
Haruo Nakano