Title:
MEMS STRUCTURE, ELECTRONIC APPARATUS AND MOVABLE BODY
Document Type and Number:
Japanese Patent JP2015211988
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an MEMS structure being capable of reducing sticking of a movable electrode with respect to a fixed electrode while enhancing a degree of freedom in design, and further to provide an electronic apparatus and a movable body provided with the MEMS structures.SOLUTION: An MEMS structure 1 comprises: a substrate 2; a lower electrode 51 disposed on the substrate 2; an upper electrode 53 having a movable portion 531 disposed so as to face the lower electrode 51 and to be spaced apart therefrom; and a protrusion portion 541 protruding from a surface of a side of the movable portion 531 facing the lower electrode 51 and being constituted of a material different from a material constituting the movable portion 531.
Inventors:
INABA SHOGO
EBINA AKIHIKO
KINUGAWA TAKUYA
EBINA AKIHIKO
KINUGAWA TAKUYA
Application Number:
JP2014094456A
Publication Date:
November 26, 2015
Filing Date:
May 01, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B81B3/00; B81C1/00; G01P15/125; H01L29/84; H03H3/007; H03H9/24
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe
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