MEMS SWITCH AND ELECTRONIC APPARATUS

Title:

MEMS SWITCH AND ELECTRONIC APPARATUS

Document Type and Number:

Japanese Patent JP2017050173

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a MEMS switch capable achieving a long life by suppressing deterioration of a beam and an electronic apparatus using the same.SOLUTION: In a MEMS switch, a first metal film 18 is stuck on one side of a first beam 13 via a first surface insulation layer 17, and a second metal film 18B is stuck on the other side of the first beam 13 via a rear surface insulation layer 17B. The first metal film 18 and second metal film 18B are located opposite each other across the first beam 13. A drive element 11 is stuck on the first metal film 18 via a second surface insulation layer 19.SELECTED DRAWING: Figure 9

Inventors:

DEGUCHI YUKI
AOYANAGI TAKESHI

Application Number:

JP2015173141A

Publication Date:

March 09, 2017

Filing Date:

September 02, 2015

Export Citation:

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