Title:
MEMS SWITCH AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2007027126
Kind Code:
A
Abstract:
To provide a MEMS (Micro Electro Mechanical System) switch capable of being driven with low voltage, and to provide its manufacturing method.
The disclosed MEMS switch comprises a lower board having a signal line formed on the upper face, an upper board installed on the upper face of the lower board at a predetermined space and having a membrane layer formed on the lower face and a cavity formed inside, a bimetal layer installed inside the cavity on the upper face of the membrane layer, a heating layer installed on the lower face of the membrane layer, and a contact member formed on the lower face of the heating layer for contacting or leaving the signal line.
Inventors:
Kim, Jong-seok
SO, Inso
Lee, Sang Hoon
Kwon, Sang-wook
Kim, Duck-hwan
Park, Yun-kwon
Jeong, Hee-moon
Hong, Young-tack
Kim, Che-heung
Yun, Seok-chul
Nam, Kuang-woo
SO, Inso
Lee, Sang Hoon
Kwon, Sang-wook
Kim, Duck-hwan
Park, Yun-kwon
Jeong, Hee-moon
Hong, Young-tack
Kim, Che-heung
Yun, Seok-chul
Nam, Kuang-woo
Application Number:
JP2006000195341
Publication Date:
February 01, 2007
Filing Date:
July 18, 2006
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
H01H61/00; B81B3/00; B81C1/00; B81C3/00; H01H11/00; H01H37/52; H01H49/00