Title:
MEMS SWITCH WITH CONDUCTIVE MECHANICAL STOPPER
Document Type and Number:
Japanese Patent JP2009152194
Kind Code:
A
Abstract:
To provide a MEMS switch preventing inconvenient conduction modes and damages on the switch caused by an accidental operation.
The MEMS switch includes a movable actuator 33 combined with the substrate, a substrate contact 35, a substrate electrode 36, and a conductive stopper 39 electrically combined with the movable actuator and formed to prevent the movable actuator from bringing into contact with the substrate electrode while the movable actuator can be brought into contact with the substrate contact. The conductive stopper prevents the movable actuator from being brought into contact with the substrate electrode.
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| WO/2016/047011 | SWITCH DEVICE AND ELECTRONIC APPARATUS |
| JPH03112032 | ELECTROSTATIC RELAY |
Inventors:
WANG XUEFENG
SUBRAMANIAN KANAKASABAPATHI
KEIMEL CHRISTOPHER FRED
AIMI MARCO FRANCESCO
KISHORE KUNA VENKAT SATYA RAMA
CLAYDON GLENN S
BOOMHOWER OLIVER CHARLES
THAKRE PARAG
SUBRAMANIAN KANAKASABAPATHI
KEIMEL CHRISTOPHER FRED
AIMI MARCO FRANCESCO
KISHORE KUNA VENKAT SATYA RAMA
CLAYDON GLENN S
BOOMHOWER OLIVER CHARLES
THAKRE PARAG
Application Number:
JP2008316853A
Publication Date:
July 09, 2009
Filing Date:
December 12, 2008
Export Citation:
Assignee:
GEN ELECTRIC
International Classes:
H01H59/00; B81B3/00; H01H57/00
Domestic Patent References:
| JP2002326197A | 2002-11-12 | |||
| JP2007535797A | 2007-12-06 |
Foreign References:
| US6967548B2 | 2005-11-22 | |||
| US6646215B1 | 2003-11-11 |
Attorney, Agent or Firm:
Kenichi Matsumoto
Hirokazu Ogura
Toshihisa Kurokawa
Arakawa Satoshi
Hirokazu Ogura
Toshihisa Kurokawa
Arakawa Satoshi
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