To provide a MEMS (micro electro mechanical system) switch which reduces a parasitic capacitance between a movable contact and both fixed contacts and secures a desired contact pressure while realizing a low power consumption.
The MEMS switch includes a base substrate 11 on which a pair of fixed contacts 15, 15 are installed and a flexible part 13 which is supported by post parts 12, 12 fixed on one surface side of the base substrate 11 and on which a movable contact 14 is formed. As a drive means to displace the movable contact 14 in a direction to short-circuit both the fixed contacts 15, 15, the switch includes a piezoelectric actuator 16 of bimorph type which is installed on the opposite side to the base substrate 11 side in the flexible part 13 and includes two layers of piezoelectric layers 16a, 16b with mutually different polarization direction between a pair of electrodes 16c, 16d and an electrostatic actuator 17 which includes a fixed electrode 17a provided at a portion opposed to the flexible part 13 on one surface side of the base substrate 11 and a movable electrode 17b provided on the opposite side to the fixed electrode 17a side in the flexible part 13.
HAYAZAKI YOSHIKI
MATSUSHIMA CHOMEI
YOSHIHARA TAKAAKI
KAWADA HIROSHI
HAGIWARA YOSUKE
Atsuo Mori