To provide an MEMS switch having improved opening and closing characteristics of contacts.
This MEMS switch 1 includes a rotor 4 rotating with a rotary pole 3 erected on a substrate 2 as a center. The rotor 4 has a plurality of support arms 8 radially extended from the rotary pole 3 so as to be disposed at regular intervals in its rotating direction. A first interdigitated electrode 9 is formed on one side face side in the rotating direction of the support arm 8, and a second comb-teeth electrode 10 is formed at a position facing the first interdigitated electrode 9 on the substrate 2, and the rotor 4 rotates if a drive voltage is impressed between both comb-teeth electrodes 9, 10 and electrostatic attracting force acts upon it. A movable contact 16 disposed on the one side face of the support arm 8 is brought into contact with and separated from a stationary contact 15 formed at a position facing the one side face of the support arm 8 on the substrate 2 as the rotor 4 rotates.
KAWADA HIROSHI
HAYAZAKI YOSHIKI
SHIRAI TAKEO
MATSUSHIMA CHOMEI
HAGIWARA YOSUKE
Atsuo Mori
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