Title:
MEMS TRANSDUCER MANUFACTURING METHOD, MEMS TRANSDUCER, ULTRASONIC PROBE, AND ULTRASONIC DIAGNOSTIC APPARATUS
Document Type and Number:
Japanese Patent JP2019016934
Kind Code:
A
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Inventors:
NAKAYAMA YUTA
Application Number:
JP2017133827A
Publication Date:
January 31, 2019
Filing Date:
July 07, 2017
Export Citation:
Assignee:
KONICA MINOLTA INC
International Classes:
H04R31/00; A61B8/14; H01L41/053; H01L41/08; H01L41/09; H01L41/113; H01L41/187; H01L41/25; H01L41/311; H04R17/00
Attorney, Agent or Firm:
鷲田 公一
木曽 孝
木曽 孝