To provide an MEMS vibrator capable of suppressing excitation of a vibration mode other than torsional vibration.
A MEMS vibrator 100 related to the present invention includes: a movable electrode 30 torsionally vibrating; and a first fixed electrode 40 and a second fixed electrode 50 formed on the movable electrode 30 via a gap therebetween. The movable electrode 30 includes: a first surface 32; and a second surface 34 and a third surface 36 which are connected to the first surface 32 and are directed opposite to each other. The first fixed electrode 40 includes: a fourth surface 42 opposite to the first surface 32; and a fifth surface 44 opposite to the second surface 34. The second fixed electrode 50 includes: a sixth surface 52 opposite to the first surface 32; and a seventh surface 54 opposite to the third surface 36. An interval D2 between the second surface 34 and the fifth surface 44 is greater than an interval D1 between the first surface 32 and the fourth surface 42. An interval D4 between the third surface 36 and the seventh surface 54 is greater than an interval D3 between the first surface 32 and the sixth surface 52.
SATO AKIRA
Osamu Suzawa
Kazuhiko Miyasaka