To provide an interatomic force microscope and scanning electrostatic capacity microscope composite device by using a metal cantilever made of a wire and having a sharp tip section and a bend section at the center.
This wire type cantilever 9 has a sharpened and bent metal wire. The cantilever 9 is moved near to a sample, the capacity between the sample and a probe 12 is measured, and the irregularities on the surface of the sample are detected. The tip of a tungsten wire is sharpened, for example, and the L-shaped wire bent by about 90° is used as the cantilever 9. The vertical portion at the front of the bend section 11 becomes the probe 12. The horizontal portion 13 on the holder 10 side is a portion generating a warp (bend). When the horizontal portion 13 is bent, the cantilever 9 is vertically moved in response to the irregularities on the surface of the sample. One microscope device can be utilized as an interatomic force microscope, an electrostatic capacity microscope, and a scanning tunnel microscope.
TOMIYA HIDETO
YOSHIMURA MASAMITSU
KAWAMI HIROSHI
