Title:
METAL CERAMIC JOINT BODY, DIAPHRAGM VACUUM GAGE, JOINT METHOD OF METAL AND CERAMIC, AND METHOD OF MANUFACTURING DIAPHRAGM VACUUM GAGE
Document Type and Number:
Japanese Patent JP2014196976
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a metal ceramic joint body capable of suppressing occurrence of distortion in a joint matter, a diaphragm vacuum gage, a joint method of metal and ceramic, and a method of manufacturing the diaphragm vacuum gage.SOLUTION: A diaphragm vacuum gage includes: a reference container 11 formed in a cylindrical shape having an opening 11a; a diaphragm formed in a plate shape blocking the opening 11a; a joint layer 21 made of glaze for joining the diaphragm to the reference container 11; and a terminal layer 22 made of glaze formed at a part on the surface of the reference container 11 that is separate from the diaphragm. The joint layer 21 is continuous to the terminal layer 22.
Inventors:
TAKAHASHI NAOKI
Application Number:
JP2013073328A
Publication Date:
October 16, 2014
Filing Date:
March 29, 2013
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G01L9/12; G01L21/00
Domestic Patent References:
| JP4764468B2 | 2011-09-07 | |||
| JP5358842B2 | 2013-12-04 | |||
| JP4682415B2 | 2011-05-11 | |||
| JP3188546B2 | 2001-07-16 | |||
| JP2005265784A | 2005-09-29 | |||
| JPS5527992A | 1980-02-28 | |||
| JPS63315928A | 1988-12-23 |
Foreign References:
| US20060191629A1 | 2006-08-31 |
Attorney, Agent or Firm:
Hironori Onda
Makoto Onda
Makoto Onda