Title:
METAL CERAMIC JOINT, DIAPHRAGM VACUUM GAGE, JOINING METHOD OF METAL TO CERAMIC, AND MANUFACTURING METHOD OF DIAPHRAGM VACUUM GAGE
Document Type and Number:
Japanese Patent JP2015129684
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a metal ceramic joint capable of suppressing occurrence of distortion in a joint material, a diaphragm vacuum gage, a joining method of metal to ceramic, and a manufacturing method of the diaphragm vacuum gage.SOLUTION: The metal ceramic joint includes: a reference container 11 having a cylindrical shape having an opening 11a at its cylinder end; a diaphragm having a plate shape blocking the opening 11a; a joint layer 21 that is made of glaze and joins the diaphragm to the reference container 11; and a conductive layer 22 that forms the external surface of the reference container 11, is covered with the joint layer 21, and has an electric conductivity higher than that of the joint layer 21. The metal ceramic joint further includes a terminal layer 23 located on a part of the surface of the reference container 11 that is separate from the diaphragm. The joint layer 21 is located between the diaphragm and terminal layer 23, and the voltage between the diaphragm and terminal layer 23 can be applied to the joint layer 21.
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Inventors:
TAKAHASHI NAOKI
YOSHIDA KEISUKE
YOSHIDA KEISUKE
Application Number:
JP2014001418A
Publication Date:
July 16, 2015
Filing Date:
January 08, 2014
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G01L9/00; G01L21/00
Domestic Patent References:
| JPH06271361A | 1994-09-27 | |||
| JP2009234832A | 2009-10-15 | |||
| JP2009210482A | 2009-09-17 | |||
| JP2002500351A | 2002-01-08 | |||
| JPH0478122A | 1992-03-12 | |||
| JP6058450B2 | 2017-01-11 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda