Title:
METAL COATING FILM DEPOSITION APPARATUS
Document Type and Number:
Japanese Patent JP2023084863
Kind Code:
A
Abstract:
To provide a metal coating film deposition apparatus that improves the film quality by supplying an additive to an electrolytic solution.SOLUTION: A film deposition apparatus 1A includes: an anode 11; a solid electrolyte membrane 13 arranged between the anode and a base B; a power supply unit 14 using the base as a cathode to apply a voltage between the anode and the base; a housing 15 housing the anode and an electrolytic solution L containing metal ions and covering an opening 15a opened on the side of the base with the solid electrolyte membrane; and a liquid tank T supplying the electrolytic solution to the housing. A control device 90 of the film deposition apparatus calculates an integrated current value obtained by integrating a current value energized from the anode to the base according to the passage of time by applying the voltage by the power supply unit, estimates the consumption of an additive based on the integrated current value, and controls an additive replenishing device 30 so that the additive corresponding to the estimated consumption is replenished to the electrolytic solution.SELECTED DRAWING: Figure 1
Inventors:
KONDO HARUKI
INAGAKI KOJI
KURODA KEIJI
OKAMOTO KAZUAKI
INAGAKI KOJI
KURODA KEIJI
OKAMOTO KAZUAKI
Application Number:
JP2021199224A
Publication Date:
June 20, 2023
Filing Date:
December 08, 2021
Export Citation:
Assignee:
TOYOTA MOTOR CORP
International Classes:
C25D21/14; C25D17/00; C25D17/10
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office
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