Title:
白金の化学蒸着のための金属錯体
Document Type and Number:
Japanese Patent JP2012515193
Kind Code:
A
Abstract:
The invention relates to platinum complexes, to a method for preparing the same and to the use thereof for the chemical vapor deposition of metal platinum. The chemical vapor deposition of platinum onto a substrate is made from a platinum organo-metal compound the includes a ligand with a cyclic structure including at least two non-adjacent C=C double bonds, and the platinum organo-metal compound has a square-lane structure in which the platinum is bonded to each of the C=C double bonds of the ligand, thereby forming a (C=C)-Pt-(C=C) of 60° to 70°.
Inventors:
Doppel pascal
Thurier Cyril
Thurier Cyril
Application Number:
JP2011545777A
Publication Date:
July 05, 2012
Filing Date:
January 08, 2010
Export Citation:
Assignee:
ECOLE NORMALE SUPERIEURE
International Classes:
C07F15/00; C07C7/173; C07C13/42; C07F7/08; C23C16/18; H01L21/28; H01L21/285
Domestic Patent References:
| JP2009038097A | 2009-02-19 |
Foreign References:
| GB906018B | ||||
| US3105084A | 1963-09-24 |
Other References:
JPN5012010357; ＮＩＣＯＬＡ ＯＢＥＲＢＥＣＫＭＡＮＮ: 'ＤＩＥ ＥＩＮＦＵＥＨＲＵＮＧ ＶＯＮ ＦＵＮＫＴＩＯＮＡＬＩＳＩＥＲＴＥＮ ＣＹＣＬＯＰＥＮＴＡＤＩＥＮＹＬ-ＬＩＧＡＮＤＥＮ 以下備考' ＤＩＳＳＥＲＴＡＴＩＯＮ , 2001, Ｐ２３，３２-３３
JPN5012010358; ＴＯＮＹ ＤＥＢＡＥＲＤＥＭＡＥＫＥＲ: 'ＰＬＡＴＩＮ-ＫＯＨＬＥＮＳＴＯＦＦ-Sigma-ＢＩＮＤＵＮＧＥＮ ＭＩＴ ＧＥＨＩＮＤＥＲＴＥＲ ＲＯＴＡＴＩＯＮ： ＣＨＬＯＲＯ（２-ＡＬＫＯＸＹＮＡＰＨＴＨ-１-ＹＬ）以下備考' ＪＯＵＲＮＡＬ ＯＦ ＯＲＧＡＮＯＭＥＴＡＬＬＩＣ ＣＨＥＭＩＳＴＲＹ , 1988, Ｐ９１-９９
JPN5012010359; 'ＳＹＮＴＨＥＳＩＳ ＯＦ ＤＩＭＥＴＨＹＬＰＬＡＴＩＮＵＭ（ＩＶ）ＣＯＭＰＯＵＮＤＳ，［｛ＰＴＭＥ２Ｘ２｝Ｎ］，［｛ＰＴＭＥ２ＸＹ｝Ｎ］ 以下備考' ＣＡＮＡＤＩＡＮ ＪＯＵＲＮＡＬ ＯＦ ＣＨＥＭＩＳＴＲＹ Ｖ７４ Ｎ１１, 199611, Ｐ２００８-２０１７, ＮＡＴＬ ＲＥＳＥＡＲＣＨ ＣＯＵＮＣＩＬ ＯＦ ＣＡＮＡＤＡ
JPN5012010360; ＴＲＥＶＯＲ Ｇ ＡＰＰＬＥＴＯＮ: 'ＤＩＳＰＬＡＣＥＭＥＮＴ ＯＦ ＮＯＲＢＯＲＮＡＤＩＥＮＥ （ＮＢＤ） ＦＲＯＭ ＰＴＭＥ２（ＮＢＤ）ＢＹ Ｎ-ＤＯＮＯＲＳ，ＤＩＭＥＴＨＹＬＳＵＬＦＯＸＩＤＥ 以下備考' ＪＯＵＲＮＡＬ ＯＦ ＯＲＧＡＮＯＭＥＴＡＬＬＩＣ ＣＨＥＭＩＳＴＲＹ Ｖ３０３ Ｎ１, 19860401, Ｐ１３９-１４９, ＥＬＳＥＶＩＥＲ-ＳＥＱＵＯＩＡ Ｓ．Ａ．
JPN5012010361; ＤＥＬＬ'ＡＭＩＣＯ: 'ＣＯＭＰＥＴＩＴＩＯＮ ＢＥＴＷＥＥＮ ＣＡＲＢＯＮ ＭＯＮＯＸＩＤＥ ＡＮＤ ＡＬＫＥＮＥＳ ＩＮ ＣＨＬＯＲＯ ＣＯＭＰＬＥＸＥＳ ＯＦ ＰＬＡＴＩＮＵＭ（ＩＩ）' ＯＲＧＡＮＯＭＥＴＡＬＬＩＣＳ , 20050101, Ｐ４４２７-４４３１
JPN5012010358; ＴＯＮＹ ＤＥＢＡＥＲＤＥＭＡＥＫＥＲ: 'ＰＬＡＴＩＮ-ＫＯＨＬＥＮＳＴＯＦＦ-Sigma-ＢＩＮＤＵＮＧＥＮ ＭＩＴ ＧＥＨＩＮＤＥＲＴＥＲ ＲＯＴＡＴＩＯＮ： ＣＨＬＯＲＯ（２-ＡＬＫＯＸＹＮＡＰＨＴＨ-１-ＹＬ）以下備考' ＪＯＵＲＮＡＬ ＯＦ ＯＲＧＡＮＯＭＥＴＡＬＬＩＣ ＣＨＥＭＩＳＴＲＹ , 1988, Ｐ９１-９９
JPN5012010359; 'ＳＹＮＴＨＥＳＩＳ ＯＦ ＤＩＭＥＴＨＹＬＰＬＡＴＩＮＵＭ（ＩＶ）ＣＯＭＰＯＵＮＤＳ，［｛ＰＴＭＥ２Ｘ２｝Ｎ］，［｛ＰＴＭＥ２ＸＹ｝Ｎ］ 以下備考' ＣＡＮＡＤＩＡＮ ＪＯＵＲＮＡＬ ＯＦ ＣＨＥＭＩＳＴＲＹ Ｖ７４ Ｎ１１, 199611, Ｐ２００８-２０１７, ＮＡＴＬ ＲＥＳＥＡＲＣＨ ＣＯＵＮＣＩＬ ＯＦ ＣＡＮＡＤＡ
JPN5012010360; ＴＲＥＶＯＲ Ｇ ＡＰＰＬＥＴＯＮ: 'ＤＩＳＰＬＡＣＥＭＥＮＴ ＯＦ ＮＯＲＢＯＲＮＡＤＩＥＮＥ （ＮＢＤ） ＦＲＯＭ ＰＴＭＥ２（ＮＢＤ）ＢＹ Ｎ-ＤＯＮＯＲＳ，ＤＩＭＥＴＨＹＬＳＵＬＦＯＸＩＤＥ 以下備考' ＪＯＵＲＮＡＬ ＯＦ ＯＲＧＡＮＯＭＥＴＡＬＬＩＣ ＣＨＥＭＩＳＴＲＹ Ｖ３０３ Ｎ１, 19860401, Ｐ１３９-１４９, ＥＬＳＥＶＩＥＲ-ＳＥＱＵＯＩＡ Ｓ．Ａ．
JPN5012010361; ＤＥＬＬ'ＡＭＩＣＯ: 'ＣＯＭＰＥＴＩＴＩＯＮ ＢＥＴＷＥＥＮ ＣＡＲＢＯＮ ＭＯＮＯＸＩＤＥ ＡＮＤ ＡＬＫＥＮＥＳ ＩＮ ＣＨＬＯＲＯ ＣＯＭＰＬＥＸＥＳ ＯＦ ＰＬＡＴＩＮＵＭ（ＩＩ）' ＯＲＧＡＮＯＭＥＴＡＬＬＩＣＳ , 20050101, Ｐ４４２７-４４３１
Attorney, Agent or Firm:
Patent Business Corporation Saegusa International Patent Office