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Patent Searching and Data


Title:
METAL DIAPHRAGM VALVE
Document Type and Number:
Japanese Patent JP2008151270
Kind Code:
A
Abstract:

To provide a metal diaphragm valve by which a raw material gas can be stably fed with a gap held constant between the metal diaphragm valve and a valve seat in a high-temperature environment.

The metal diaphragm 15 which performs opening and closing operations of a valve by contacting with a valve seat 14 by a pressing force of a valve bar 16 to return flexibly to an original form by releasing the pressing force of the valve bar 16 is made Hv 500 or higher in Vickers hardness by applying aging heat hardening treatment. As a result, even in a high-temperature environment, the metal diaphragm 15 can be reduced in the deterioration of a reactive force (elastic force) and in a thermal expansion amount and thereby a gap between the metal diaphragm 15 and the valve seat 14 is held constant, so that the raw material gas is stably fed.


Inventors:
Matsumura, Eiji
Honma, Katsuhiko
Application Number:
JP2006000340475
Publication Date:
July 03, 2008
Filing Date:
December 18, 2006
Export Citation:
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Assignee:
KITZ SCT:KK
International Classes:
F16K7/12
Domestic Patent References:
JPH07317925A
JPH07317926A
JPH0480342A
JP2005207480A
JP2004002967A
Attorney, Agent or Firm:
小林 哲男