メタルマスク及びマスクユニット - Dai Nippon Printing Co.,Ltd.

Title:

メタルマスク及びマスクユニット

Document Type and Number:

Japanese Patent JP4614784

Kind Code:

B2

Abstract:

To correctly evaluate in-plane positional accuracy, in a metal mask used by fixing it to a frame with tension applied thereto.

In order to allowing the in-plane positional accuracy of a metal mask 1 having a mask part 2 provided with multiple openings 3 to be correctly evaluated, marks 9 for evaluating the positional accuracy allowing a center position to be detected by processing an image are previously formed at a plurality of positions outside the mask part 2 by half-etching; and the in-plane positional accuracy can correctly be evaluated by position measurement of the marks for evaluating positional accuracy.

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Inventors:

Teru Tsuchiya
Toshihiro Sano
Junichi Yamada

Application Number:

JP2005030050A

Publication Date:

January 19, 2011

Filing Date:

February 07, 2005

Export Citation:

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Assignee:

Dai Nippon Printing Co.,Ltd.

International Classes:

H05B33/10; C23C14/04; H01L51/50

Domestic Patent References:

JP2005005070A
JP2004335487A
JP2001237073A
JP2004087466A
JP2006114402A
JP2006111941A
JP2006152411A

Attorney, Agent or Firm:

Kyozo Norimatsu

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