To obtain a metal mask comprising a metal composite plating film including carbon nanotubes, which metal mask has hardness, causes little elongation and breakage, and also scarcely projects the tip of the carbon nanotube from the surface thereof even when the metal mask is of a foil product.
The metal mask has a three-layer structure comprising: a first film 1a as a support comprising a Ni plating film not including the carbon nanotube; a second film 1b provided on the first film, comprising a Ni plating film including the carbon nanotube, and having tensile strength; and a third film 1c as a support provided on the second film and comprising a Ni plating film not including the carbon nanotube, wherein the tip 2 of the carbon nanotube incorporated in the second film is slightly projected from the surface of the third film while coated with a thin Ni plating film.
AIZAWA MASAICHI
Hideki Takahashi
Jiro Ozawa