Title:
METAL OXIDE FILM DEPOSITION APPARATUS
Document Type and Number:
Japanese Patent JP2008138244
Kind Code:
A
Abstract:
To provide a metal oxide film deposition apparatus for inexpensively depositing a metal oxide film having stable film quality.
The metal oxide film deposition apparatus 10 is provided with: a vaporizer 4 generating a gaseous starting material for film-depositing a metal oxide on the surface of a base material 2; a reaction vessel 6 storing the base material 2 and vapor-depositing the gaseous starting material generated by the vaporizer 4 on the surface of the base material 2; an air suction port 8 feeding the air conveying the gaseous starting material to the reaction vessel 6; and an air dryer 12 adjusting the humidity of the air.
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Inventors:
KONNO YUYA
YASUI TOYOAKI
HANANAKA KATSUYASU
TAZAKI AKINORI
ITAGAKI KENJI
YASUI TOYOAKI
HANANAKA KATSUYASU
TAZAKI AKINORI
ITAGAKI KENJI
Application Number:
JP2006324097A
Publication Date:
June 19, 2008
Filing Date:
November 30, 2006
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
C23C16/40
Attorney, Agent or Firm:
Noriharu Fujita
Kunio Ueda
Kunio Ueda
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