To provide a metal recovery method whereby a film-forming substance containing a metal can be recovered from a vacuum film deposition apparatus, and to provide a film deposition method using the film-forming substance containing the metal recovered by the metal recovery method.
A metal recovery method comprises: disposing a polymer film 30 in at least a portion other than a deposited part in an interior of a vacuum chamber 11 composing a vacuum deposition apparatus; allowing a depositing substance, which is scattered in the portion other than the deposited part upon formation by the vacuum deposition apparatus, to deposit onto the polymer film 30; and, after the deposition by the vacuum deposition apparatus, recovering and firing the polymer film 30, thereby removing a resin component of the polymer film 30 and recovering the depositing substance containing a metal.
KURODA TOSHIYA
SANADA TAKASHI
Naozumi Hiroyasu
Norihiko Ara
Hiroyuki Kato
Mitsunaga Igarashi