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Patent Searching and Data


Title:
METAL RECOVERY METHOD AND FILM DEPOSITION METHOD
Document Type and Number:
Japanese Patent JP2013216953
Kind Code:
A
Abstract:

To provide a metal recovery method whereby a film-forming substance containing a metal can be recovered from a vacuum film deposition apparatus, and to provide a film deposition method using the film-forming substance containing the metal recovered by the metal recovery method.

A metal recovery method comprises: disposing a polymer film 30 in at least a portion other than a deposited part in an interior of a vacuum chamber 11 composing a vacuum deposition apparatus; allowing a depositing substance, which is scattered in the portion other than the deposited part upon formation by the vacuum deposition apparatus, to deposit onto the polymer film 30; and, after the deposition by the vacuum deposition apparatus, recovering and firing the polymer film 30, thereby removing a resin component of the polymer film 30 and recovering the depositing substance containing a metal.


Inventors:
ITO YUTAKA
KURODA TOSHIYA
SANADA TAKASHI
Application Number:
JP2012089297A
Publication Date:
October 24, 2013
Filing Date:
April 10, 2012
Export Citation:
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Assignee:
SUMITOMO CHEMICAL CO
International Classes:
C23C14/00
Attorney, Agent or Firm:
Sumio Tanai
Naozumi Hiroyasu
Norihiko Ara
Hiroyuki Kato
Mitsunaga Igarashi