Title:
METAL REMOVAL FILTER, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2021103761
Kind Code:
A
Abstract:
To provide a technique for effectively removing a metal in an organic solvent.SOLUTION: A metal removal filter for techniques disclosed herein removes metal from an organic solvent in a solvent path, which is mounted on the solvent path for supplying the organic solvent in a substrate processing device for processing a substrate using the organic solvent, and includes at least one cartridge portion that houses a silica-based porous body that can be regenerated by regenerating liquid, and a housing portion on which the cartridge portion is mounted.SELECTED DRAWING: Figure 10
Inventors:
YAMAGUCHI TAKAHIRO
KOBAYASHI KENJI
YOSHIDA TAKESHI
KOBAYASHI KENJI
YOSHIDA TAKESHI
Application Number:
JP2020107484A
Publication Date:
July 15, 2021
Filing Date:
June 23, 2020
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
H01L21/304; B01D15/00; B01D24/00; B01D29/11
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita