To provide a metal-silicon compound alkoxide suppressing the formation of aggregate and controlling the number of ligands based on the metal atom.

The metal-silicon compound alkoxide is expressed by general formula (1) (in the formula, M is a metal atom; R groups are each an alkyl group which may be the same or different; R' groups are each a 4C alkyl group which may be the same or different; Q is a bivalent hydrocarbon group or a bivalent organic group containing sulfur atom and these groups may be the same or different; X groups are each a univalent hydrocarbon group which may be the same or different; (a) is an integer of 0-3; (b) is an integer of 1-5; and (n) is an integer not larger than (b)).