Title:
METALLIC BLOCK FOR LIQUID PHASE EPITAXY AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH05178686
Kind Code:
A
Abstract:
PURPOSE:To provide a metallic block for liquid phase epitaxy used as a solvent for making the distribution of dopant concentrations uniform. CONSTITUTION:A dopant housing part 2 where granulated dopants are housed and held is formed on the surface of a metallic block 1 which is almost semicircular as a whole. For the dopant housing part 2, recessed parts 3 formed on the surface of the metallic block 1 while dispersing them uniformly are suitable. The metallic block 1 is produced by casting a metal having high-purity and a low melting point.
Inventors:
SAWAI HIROSHI
Application Number:
JP34649591A
Publication Date:
July 20, 1993
Filing Date:
December 27, 1991
Export Citation:
Assignee:
KANSAI NIPPON ELECTRIC
International Classes:
B22D25/02; C30B19/02; C30B19/06; H01L21/208; (IPC1-7): B22D25/02; C30B19/02; C30B19/06; H01L21/208
Attorney, Agent or Firm:
Shogo Ehara