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Patent Searching and Data


Title:
METALLIC CONTAMINATION PREVENTING SYSTEM AND METHOD IN CLEAN ROOM
Document Type and Number:
Japanese Patent JP2011122786
Kind Code:
A
Abstract:

To provide a metallic contamination preventing system in a clean room, which effectively removes metallic particles attached to a clean suit in moving to another room to prevent diffusion of metallic contamination.

This metallic contamination preventing system 10 disposed in an inlet/outlet booth 60 where a worker passes in entering and leaving a work room in the clean room, has a pair of adhesive sheets 12 disposed while adhesive faces are opposed to each other to hold a body of the worker 40 at a metallic particle removing position, and tension rollers 20 for pressing the adhesive sheets 12 to the body of the worker 40 at the metallic particle removing position. Further, this metallic contamination preventing system 10 preferably includes rollers 14 for feeding out the adhesive sheets 12 to the metallic particle removing position, and take-up rollers 16 for taking up the adhesive sheets 12 used in the metallic particle removing position.


Inventors:
KASEGAWA NAOJI
Application Number:
JP2009281749A
Publication Date:
June 23, 2011
Filing Date:
December 11, 2009
Export Citation:
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Assignee:
HITACHI PLANT TECHNOLOGIES LTD
International Classes:
F24F7/06; A47L25/00; B08B1/00; B08B5/02
Attorney, Agent or Firm:
Yuichi Murakami
Takahiro Deguchi