Title:
METALLIC THIN FILM RESISTOR
Document Type and Number:
Japanese Patent JPS6024343
Kind Code:
A
Abstract:
PURPOSE: To set the coefft. of resistance temp. at a desired value and to improve the uniformity and stability by providing a composition consisting of specified amounts of Ta, Cr and Al in a square region defined by specified four points in the composition diagram of a ternary Ta-Cr-Al alloy.
CONSTITUTION: This metallic thin film resistor consists of, by atom, 2W24% Ta, 24W88% Cr and 3W67% Al. The composition is in a square region defined by a point A (2% Ta, 88% Cr, 10% Al), a point B (9% Ta, 24% Cr, 67% Al), a point C (24% Ta, 72% Cr, 4% Al) and a point D (19% Ta, 78% Cr and 3% Al) in the composition diagram of a ternary Ta-Cr-Al alloy.
Inventors:
HARA YOSHIO
SAITOU MASAMITSU
SUZUKI HIDEYUKI
KOYAMA MASARU
SAITOU MASAMITSU
SUZUKI HIDEYUKI
KOYAMA MASARU
Application Number:
JP13212483A
Publication Date:
February 07, 1985
Filing Date:
July 20, 1983
Export Citation:
Assignee:
TAISEI KOKI KK
International Classes:
C22C21/00; C22C27/06; C22C30/00; C23C14/14; H01C7/00; (IPC1-7): C22C21/00; C22C27/06
Domestic Patent References:
| JPS58153752A | 1983-09-12 |
Attorney, Agent or Firm:
Moriya Kazuo
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