Title:
ポジ型感光性樹脂組成物の製造方法
Document Type and Number:
Japanese Patent JP4026246
Kind Code:
B2
Inventors:
Tomoyuki Yoshida
Takashi Okamoto
Masao Tomikawa
Takashi Okamoto
Masao Tomikawa
Application Number:
JP29048198A
Publication Date:
December 26, 2007
Filing Date:
October 13, 1998
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
C08L79/08; H01L21/027; C08G73/10; C08K5/28; G03F7/022; G03F7/037
Domestic Patent References:
| JP2181149A | ||||
| JP10114865A | ||||
| JP4288320A | ||||
| JP3115461A | ||||
| JP10186658A | ||||
| JP11102068A | ||||
| JP3262108B2 |