Title:
METHOD AND APPARATUS FOR ACCELERATED TEST OF SEMICONDUCTOR ELEMENT
Document Type and Number:
Japanese Patent JP3813752
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a method and an apparatus in which an accelerated test can be made in a proper stress range by a method, wherein a voltage whose frequency is higher than a commercial frequency is applied across both electrodes of a semiconductor element, a leakage current is measured and a change in a withstand voltage is estimated.
SOLUTION: A three-phase alternating current from a three-phase commercial power supply 3 is converted into a direct current by a converter 4, it is converted into an AC voltage at a higher frequency by an inverter 5, and it is stepped up to a prescribed voltage by a transformer 2 to be applied across the anode and the cathode of an optical thyristor 1. A voltage probe 8, which is connected across both output terminals 2B of the transformer 2, measures voltage. A CT 7 which is installed at a connection line 16 to one output terminal 2B, and the cathode detects a current. On the basis of the detection value of the CT 7 and of the detection value of the voltage probe 8, a recording device 9 records changes in an anode current (a leakage current) from one to 20,000 hours. At this time, the breakdown voltage of a semiconductor element which is used for a long period is dropped. A leakage current, which is larger at the same voltage as compared with a normal semiconductor element, flows. Consequently, when the leakage current is measured, the change in the breakdown voltage can be estimated.
Inventors:
Shuji Ogata
Yoshitaka Sugawara
Yoshitaka Sugawara
Application Number:
JP70599A
Publication Date:
August 23, 2006
Filing Date:
January 05, 1999
Export Citation:
Assignee:
Kansai Electric Power Co., Inc.
International Classes:
G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66
Domestic Patent References:
| JP54154279A | ||||
| JP57166568A | ||||
| JP60257145A | ||||
| JP61036187B1 | ||||
| JP62015855A | ||||
| JP1149471A | ||||
| JP5180901A | ||||
| JP10026651A |
Foreign References:
| US5610926 |
Other References:
Colin Oates,Accelerated life testing of a traction inverter,Power Electronics Reliability - Promise and Practice. Does it Deliver? (Digest No. 1998/202), IEE Co,英国,IEE,1998年 2月10日,pp. 2/1 - 2/4
Frede Blaabjerg, John K. Pedrsen, Ulrik Jaeger,Evaluation of Modern IGBT-modules for Hard-switched AC/DC/AC Converters,Industry Applications Conference, 1995. Thirtieth IAS Annual Meetings, IAS '95,米国,IEEE,1995年10月 8日,Vol. 2,pp. 997-1005
Frede Blaabjerg, John K. Pedrsen, Ulrik Jaeger,Evaluation of Modern IGBT-modules for Hard-switched AC/DC/AC Converters,Industry Applications Conference, 1995. Thirtieth IAS Annual Meetings, IAS '95,米国,IEEE,1995年10月 8日,Vol. 2,pp. 997-1005
Attorney, Agent or Firm:
Hiroshi Yamazaki
Atsushi Maeda
Ryuji Higashijima
Atsushi Maeda
Ryuji Higashijima
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