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Title:
METHOD AND APPARATUS FOR ALIGNMENT OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS62266900
Kind Code:
A
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Inventors:
MURATA HIROSHI
IWATA TOMIO
Application Number:
JP10966086A
Publication Date:
November 19, 1987
Filing Date:
May 15, 1986
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/68; H01L21/67; H05K13/02; (IPC1-7): H01L21/68; H05K13/02
Attorney, Agent or Firm:
Noriyuki Noriyuki



 
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