Title:
METHOD AND APPARATUS FOR AUTOMATIC MANUFACTURE
Document Type and Number:
Japanese Patent JPH05125538
Kind Code:
A
Abstract:
PURPOSE: To provide a method and an apparatus for automatic manufacture, in which the variation of the equipment condition can be decided from informations of the equipment positional movement and the equipment driving and manufacturing conditions and informations of the product manufactured result.
CONSTITUTION: The positional movement of a sputtering device 201 is monitored with a device controller 101 and the manufacturing condition and manufactured result for substrate is monitored with monitor stages 402, 301 and these are transmitted into a calculator 401 and both monitor data are transmitted into a calculator 100 to decide the condition of the sputtering device 201 from these monitor data.
Inventors:
SAKATA MASAO
IWASAKI TAKEMASA
NAKAZATO JUN
SHIMOSHA SADAO
KOBAYASHI HIDE
IWASAKI TAKEMASA
NAKAZATO JUN
SHIMOSHA SADAO
KOBAYASHI HIDE
Application Number:
JP28763691A
Publication Date:
May 21, 1993
Filing Date:
November 01, 1991
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B23Q41/08; B65G61/00; C23C14/34; C23C14/54; G05B19/418; G06Q50/00; G06Q50/04; H01L21/203; (IPC1-7): B23Q41/08; C23C14/34; C23C14/54; G06F15/21; H01L21/203
Attorney, Agent or Firm:
Masami Akimoto
Previous Patent: JPS5125537
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